Description
New 15K Array, compatible with cryopump U6H.
P/N: 1UL15KA0001
The item doesn’t include the required Indium gaskets for the restoration of thermal continuity between the replaced parts.
At maintenance time it’s strongly recommended to replace every part which is subjected to worn-out or has reduced functionality due to aging. Following this approach, we offer our customers high-quality compatible components for the maintenance of the devices.
For a complete maintenance intervention, which allows you to minimize machine downtime and allows you to recondition your cryopump at best, we suggest to customers also evaluate the purchase of the other spare parts related to your pump.